Color online Sheet resistance and Ru layer density of Ru thin film on... | Download Scientific Diagram
Ru nucleation and thin film smoothness improvement with ammonia during chemical vapor deposition: Journal of Vacuum Science & Technology A: Vol 34, No 3
Atomic Layer Deposition of Ru for Replacing Cu-Interconnects | Chemistry of Materials
IJMS | Free Full-Text | Seedless Cu Electroplating on Ru-W Thin Films for Metallisation of Advanced Interconnects
Hydrogen diffusion through Ru thin films - ScienceDirect
Enhanced Electrical Properties of an Al-Doped TiO2 Dielectric Film on a TiN Electrode by Adopting an Atomic Layer Deposited Ru Interlayer | ACS Applied Electronic Materials
SEM images of Ru films deposited at T dep = 198°C, and deposition... | Download Scientific Diagram
![PDF] Growth and nanostructure of conformal ruthenium films by liquid-source metalorganic chemical vapor deposition by Sandwip Dey, Jaydeb Goswami, A. Das, Wei Cao, M. Floyd, Ray Carpenter · OA.mg · 10.1063/1.1576513](https://og.oa.mg/Growth%20and%20nanostructure%20of%20conformal%20ruthenium%20films%20by%20liquid-source%20metalorganic%20chemical%20vapor%20deposition.png?author=%20Sandwip%20Dey,%20Jaydeb%20Goswami,%20A.%20Das,%20Wei%20Cao,%20M.%20Floyd,%20Ray%20Carpenter "PDF] Growth and nanostructure of conformal ruthenium films by liquid-source metalorganic chemical vapor deposition by Sandwip Dey, Jaydeb Goswami, A. Das, Wei Cao, M. Floyd, Ray Carpenter · OA.mg · 10.1063/1.1576513")
PDF] Growth and nanostructure of conformal ruthenium films by liquid-source metalorganic chemical vapor deposition by Sandwip Dey, Jaydeb Goswami, A. Das, Wei Cao, M. Floyd, Ray Carpenter · OA.mg · 10.1063/1.1576513
BALD Engineering - Born in Finland, Born to ALD: Low temperature ALD of Rutheium using H2O as co-reactant
The effect of temperature and bias on the energy storage of a Ru/YSZ/Ru thin-film device - ScienceDirect
Schematic models of AB-type Ru ALD using the sequences Ru(EtCp) 2 −O 2... | Download Scientific Diagram
a,b). The dependence of Ru film thickness on the number of ALD cycles... | Download Scientific Diagram
Coatings | Free Full-Text | Growth of Atomic Layer Deposited Ruthenium and Its Optical Properties at Short Wavelengths Using Ru(EtCp)2 and Oxygen | HTML
IJMS | Free Full-Text | Seedless Cu Electroplating on Ru-W Thin Films for Metallisation of Advanced Interconnects
Atomic Layer Deposition of Ru for Replacing Cu-Interconnects | Chemistry of Materials
Electrochemical Growth of Cu(Ru) Films via Underpotential Deposition of Pb, Surface-Limited Redox Replacement of Cu, and Underpotential Deposition of Ru | SpringerLink
Catalysts | Free Full-Text | Plasma-Deposited Ru-Based Thin Films for Photoelectrochemical Water Splitting | HTML
IJMS | Free Full-Text | Seedless Cu Electroplating on Ru-W Thin Films for Metallisation of Advanced Interconnects
Resistivity vs thickness for c-axis single crystal Ru films deposited... | Download Scientific Diagram
Catalysts | Free Full-Text | Plasma-Deposited Ru-Based Thin Films for Photoelectrochemical Water Splitting | HTML
Ultrafast Time-Resolved Pump–Probe Investigation of Nanosecond Extreme Ultraviolet-Light-Induced Damage Dynamics on B4C/Ru Nano-Bilayer Film | Nano Letters
Dependence of Ru film thickness and resistivity on the amount of ALD... | Download Scientific Diagram
XRD patterns of the Ru films on TaN (5 nm)/Si with different growth... | Download Scientific Diagram
Anomalous Optoelectric Properties of an Ultrathin Ruthenium Film with a Surface Oxide Layer for Flexible Transparent Conducting Electrodes - Oh - 2022 - Advanced Functional Materials - Wiley Online Library
SEM measured Ru film thickness vs deposition process cycle number at... | Download Scientific Diagram
